Introduction

As Machine Conditioning Source department, we are responsible for the general conditioning (thermal, gas, cooling) of the EUV source. Within that department you will be working in a multi-disciplinary team that's tasked with the design and industrialization of the hardware supplying liquid tin to the source vessel.

Your assignment

The recent electronics shortage gave a strong push towards higher output of lithography systems. To enable higher throughput, higher EUV source powers are required. One bottleneck for higher source power is the feed pressure of the liquid tin supply. The liquid tin is used to create a constant stream of droplets to be hit by a high-power laser, which creates a hot plasma which radiates the EUV light. Higher pressure gives more droplets per second, which gives more EUV light. The current system is pressurized by means of gas. There are several technical limits to this system which will be reached in the coming years. To enable higher pressures (>2000 bar) a new pressurization method is envisioned using the expansion of the tin solid-liquid phase change. By melting a fluid in a confined space tremendous pressures can be reached. This internship focusses on validating a way to harness this pressure in a practical way.

With the aid of experienced colleagues, you will integrate a test setup to validate the concept of a phase-change powered tin pump. You need to prove by analysis that the setup can create and withstand both the temperatures (250 C) and pressures (>2000 bar). You will be working in close collaboration with experienced designers and technology experts to develop enabling technology for next generation of lithography tools. Key deliverables include:

• Read up the design and previous modeling
• Come up with a validation test plan
• Oversee the integration of the tin pump in a test setup
• Measure the performance of the tin pump
• Perform data analysis on the measurement
• Compare the measured results to the models and identify discrepancies and document your conclusions

This is a master (thesis or non-thesis) internship for minimum 6 months, minimum 4 days per week (on-site). The start date of this internship is as of February 2026.

Your profile

To be a fit for this assignment, you:

• Have a background in (Applied) Physics or Mechanical Engineering;
• Must be capable of devising practical tests and interpreting data;
• Have experience with simulation of non-linear materials or phase transitions (preferable);
• Are capable of explaining the technical details to someone unfamiliar with physics;
• Are critical of your own work/test results;
• Possess great communication skills in English, both written and verbally.

Other requirements you need to meet:

• You are enrolled at an educational institute for the entire duration of the internship;

• You need to be located in the Netherlands to be able to perform your internship. In case you 're currently living/studying outside of the Netherlands, your CV/motivation letter includes the willingness to relocate.

• If you are a non-EU citizen, studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement).

This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

Inclusion and diversity

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that inclusion and diversity is a driving force in the success of our company.

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